"Thou hast escaped me!" [Chillingworth] repeated more than once. "Thou hast escaped me!" "May God forgive thee!" said the minister. "Thou, too, hast deeply sinned!" (23.28-29)
After Dimmesdale dies, we don't see what happens to Chillingworth. But we do get the feeling that, eventually, he realizes that he's done some bad things. Giving his fortune to Pearl feels a lot like an apology and a confession. Maybe there's hope for him after all.